Although
all-dielectric metamaterials offer a low-loss alternative to current
metal-based metamaterials to manipulate light at the nanoscale and may have
important applications, very few have been reported to date owing to the
current nanofabrication technologies. We develop a new “nano–solid-fluid
assembly” method using 15-nm TiO2 nanoparticles as building
blocks to fabricate the first three-dimensional (3D) all-dielectric
metamaterial at visible frequencies. Because of its optical transparency, high
refractive index, and deep-subwavelength structures, this 3D all-dielectric metamaterial-based
solid immersion lens (mSIL) can produce a sharp image with a super-resolution
of at least 45 nm under a white-light optical microscope, significantly
exceeding the classical diffraction limit and previous near-field imaging
techniques.
Theoretical analysis reveals that electric field enhancement can be formed
between contacting TiO2 nanoparticles, which causes effective
confinement and propagation of visible light at the deep-subwavelength scale.
This endows the mSIL with unusual abilities to illuminate object surfaces with
large-area nanoscale near-field evanescent spots and to collect and convert the
evanescent information into propagating waves. Our all-dielectric metamaterial
design strategy demonstrates the potential to develop low-loss nanophotonic
devices at visible frequencies.
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